Scanning Electron Microscope
and
Atomic Force Microscope
Magnification : 1-300,000x
Detector : SE,BSE,EDS
Resolution
3 nm @ 20 kV, SE
4 nm @ 20 kV, BSE
Magnification : 1-300,000x
Detector : SE,Low vac,BSE,EDS
Resolution
3 nm @ 30 kV, SE
7 nm @ 3 kV, SE
4 nm @ 30 kV, BSE
3 nm @ 30 kV, SE, 30 Pa
Magnification : 1-300,000x
Detector : SE,Inlens,BSE,EDS
Resolution
2.5 nm @ 15 kV, SE
4 nm @ 3 kV, SE
5 nm @ 1 kV, SE
Magnification : 1-1,000,000x
Detector : SE,BSE,EDS,Low vac , EBSD STEM,CL
Resolution
0.9 nm @ 30 kV, SE
2.5 nm @ 30 kV, BSE, 30 Pa
1.5 nm @ 30 kV, SE, 30 Pa
Magnification : 1-2,500,000x
Detector : SE,Inlens,BSE,EDS,EBSD STEM,CL
Resolution
0.7 nm @ 15 kV, SE
1.1 nm @ 1.0 kV, SE
Magnification : 1-2,500,000x
Detector : SE,Inlens,BSE,EDS,EBSD STEM,CL
Resolution
0.6 nm @ 15 kV, SE
1.0 nm @ 1 kV, SE
Ceramic, 10 kV / ETD
Non-destructive 500 V imaging of lithium-ion battery polymer membrane fibers under the surface-sensitive condition
Mesoporous Silica
1 kV (Duo-Dec) / lnlens
Chip, 5kV / ETD
Polymer magnetic beads, with poor conductivity, characterized using a low-voltage at 2 kV with Everhart-Thornley Detector (ETD) for the characterization of biologically targeted drug delivery
Waveguide
1 kV / ETD-SE
Electron System
Magnification : 1-2,500,000x
Detector : SE,Inlens,BSE,EDS,EBSD STEM,CL
Resolution
0.6 nm @ 15 kV, SE
1.0 nm @ 1 kV, SE
Ion Beam System
Ion Source Type : Gallium
Resolution : 3 nm @ 30 kV
Acceleration Voltage : 0.5 kV to 30 kV
Optional : Nano-manipulator
Gas Injection System
Plasma Cleaner
Cross-Section Observation
Lamella Lift-out by Nano-Manipulator
TEM Specimen Preparation